I offer the following items (i.e.):

maintenance, service and fault diagnostics, Helium-leak detection, moving (disassembling and re-commissioning), adjustment of hard- and software for new processes and technologies, entire retrofits (new for old), distribution of components, consulting, project planing.

Because the experience I made in over 20 years where I working for

Leybold Heraeus (LH), Leybold AG, Balzers Process Systems (BPS), Unaxis and SenVac

I be very familiar with the following coating systems (i.e.):

Inline-, Batch- and Load lock-systems named:

Z600, Z700, Z1200, ZV4000, ZV6000, Z650, Z550, Z590 SMS, ZV1200, ZV800, Z400, Z401, LE301, ZH620, CEV (Corona, Emerald, Vanguard, AluFill),
Topaz RFD, L560.

The systems named above are used for sputter and etch processes with DC- and / or RF - sources for a lot of different substrates and with different processes.

Please feel free to contact me any time any way you like to have more information and / or a consulting for your specific problem under

service@tshoehn.de

Phone: +49 - 6184 - 909276

maintenance, service and fault diagnostics, Helium-leak detection, moving (disassembling and re-commissioning), adjustment of hard- and software for new processes and technologies, entire retrofits (new for old), distribution of components, consulting, project planing.

Leybold Heraeus (LH), Leybold AG, Balzers Process Systems (BPS), Unaxis and SenVac

Inline-, Batch- and Load lock-systems named:Z600, Z700, Z1200, ZV4000, ZV6000, Z650, Z550, Z590 SMS, ZV1200, ZV800, Z400, Z401, LE301, ZH620, CEV (Corona, Emerald, Vanguard, AluFill),Topaz RFD, L560.

The systems named above are used for sputter and etch processes with DC- and / or RF - sources for a lot of different substrates and with different processes.

Inline-, Batch- and Load lock-systems named:

Z600, Z700, Z1200, ZV4000, ZV6000, Z650, Z550, Z590 SMS, ZV1200, ZV800, Z400, Z401, LE301, ZH620, CEV (Corona, Emerald, Vanguard, AluFill),
Topaz RFD, L560.